AEGIS is the core manufacturing equipment of the CELL process (the lamination process of TFT substrate and color filter substrate), and plays an important role in the manufacture of liquid crystal displays. The device is a device that forms a functional polymer film called an alignment film that uses special ultraviolet light and a small photomask to orient the liquid crystal molecules inside the display in a certain direction.The functional polymer film can be accurately and uniformly scanned and exposed thinly on a huge mother glass (up to approx. 3m x 4m) for high productivity and uniform exposure quality. In addition, compared with the conventional "rubbing method", since the alignment film is formed in a non-contact manner using light, defects such as foreign matter and scratches do not occur in principle, and a significant increase in yield can be expected.

The large-scale glass substrate exposure equipment RZ is the core exposure equipment of the CF (color filter) process and is important in FPD (flat panel display) production. The RZ is an exposure device for the BM (Black Matrix) process released by NSK Technology*1 in 1994. Since then it has continued to grow and bear fruit with the evolution of FPD, and in 2018 sold the first G10.5 compatible machine (about 3m x 4m), establishing itself as an industry standard machine that we are proud of as a Exposure equipment, world-class share.

The DZ is a close-contact exposure device best suited for exposure of IC leadframes, HDD suspended load beams, and OLED vapor deposition masks. In addition to the equipment using the vertical transport vertical exposure method, there are also models that support horizontal transport horizontal exposure and single-wafer type models, which are compatible with various applications.

Capricorn is an automated visual inspection device for the FPD manufacturing process. Image information captured by a dedicated line scan CCD camera is analyzed by a high-performance image processing device, and defect information (position, presence, shape, OK/NG, etc.) is output instantaneously.Defect information is used for problem analysis and yield management. For example, defect information is deployed to defect correction equipment downstream of inspection equipment and used. In addition, which equipment in the upstream process and how the defect occurred can be immediately grasped from the location and content of the defect.Since its launch in 2002, the device has been widely used in various manufacturing processes for FPD (Flat Panel Displays) and can handle glass substrates up to approximately 3 x 3.4 m. Especially in the CF (color filter) process and CELL process (lamination process of TFT substrate and color filter substrate) in the LCD (liquid crystal display) manufacturing process, as well as in the module process, it is widely used and is a semi-finished product.

Jupiter is a device that corrects defects generated in the FPD manufacturing process, such as various defects such as protrusion-shaped defects generated during film formation, foreign matter mixed in the film, and missing pixels and wiring patterns. It corresponds.​​Using the uniquely developed multi-function correction head and high-speed stage, defects can be corrected with high accuracy and high speed. In addition, it is equipped with a high-performance microscope that can properly magnify according to the shape of the defect, allowing you to observe and analyze the defect with a clear image.Jupiter has been used by all customers involved in FPD manufacturing since its introduction in 1999 and is especially suitable for color filter (CF) processes due to its high correction quality, reliability and ease of operation. We are proud of our overwhelming delivery record and are still highly regarded.

The TFT (Thin Film Transistor) process is the most important and complex process in the FPD manufacturing process. The performance and quality of LCD (Liquid Crystal Display) and OLED (Organic EL Display) are largely influenced by the technology and quality of the TFT used.Taurus is a defect correction device that supports yield management* for TFT manufacturing, which has become increasingly complex and difficult as displays evolve.The metal film can be locally formed by the gas window laser CVD, and the open defect in the metal wiring can be corrected. In addition to correcting defects by applying conductive materials, high-performance lasers can also perform high-precision and low-damage corrections. In addition, by adopting a high-speed stage, the substrate processing time is shortened even for the world's largest glass substrate measuring 3m x 3.4m.

FPDs are made by precisely stacking multiple layers of fine patterns, such as thin wires and electrodes, on a huge glass substrate. In addition, LCD (Liquid Crystal Display) and OLED (Organic EL Display) are completed by various processes by stacking a color filter (CF) substrate and a vapor deposition mask on a TFT (Thin Film Transistor) substrate.The Mercury is a coordinate measurement device that measures a wide variety of substrates up to 3m x 3.4m with sub-micron accuracy during FPD manufacturing where stack-up accuracy is required. It also supports the dimensional measurement of tiny pixel patterns of a few microns, which is required when manufacturing high-definition OLEDs for smartphones.From its inception in 2000 to today, it has an overwhelming delivery record, is unmatched by other companies as an industry standard machine, and is still highly regarded.

With the high definition of FPD (Flat Panel Display), TFT (Thin Film Transistor) is becoming more and more complex, and micro-dimensioning machine is becoming more and more important as a yield management tool.Venus is a micro-dimension measuring machine that can measure various substrates up to 3m x 3.4m with sub-micron accuracy to support various measurement requirements.

Photomasks for displays are becoming clearer and larger due to increased production of small and medium sized OLEDs and FPDs using G10.5 (about 3m x 3.4m) mother glass. ​​Reticle detection device Gemini is a simplified high-precision X-axis air guide device, an active vibration isolation table combined with a high-rigidity stone table top three-dimensionally, a high-precision high-rigidity mask bracket, and a unique rotating mechanism, ceramic vertical air guide The original technology of the buoy technology and the internal CAD database conversion circuit are used for comparison and detection, as well as various detection logics such as "mura mapping" and "high-sensitivity detection function of micro-contact holes". The image processing engine provides high-speed, high-precision visual inspection, which meets 8K Photomask requirements for displays and small and medium organic EL displays.Additionally, the design is flexible enough to accommodate factory layouts such as semi-built-in vibration isolation tables and flat surfaces containing thin film handling systems for direct access to the AGV.

Sculptor is a defect correction device specially designed for FPD photomask defect correction.Open defects (missing or missing patterns) can be corrected by gas window laser CVD. In addition, it is equipped with a laser optimized for repairing short defects (abnormal pattern connections) for high-quality defect correction. It also supports photomask defect correction with halftone patterns* (patterns of light passing through a metal film).*(Photo) Observation image of halftone pattern transmitted illumination(The shading part is displayed in black, the transparent part is displayed in gray, and the translucent part is displayed in dark gray)

Mercury SHR is a photomask coordinate measuring machine that achieves the highest level of measurement accuracy in the world.The device employs multiple techniques to measure giant photomasks with nanometer resolution. Air sliders and measuring stages with high positioning accuracy and high flatness, laser interferometers and linear encoders that control the position of the stage in nanometers, and the minimization of adverse environmental effects, etc. The advanced optomechanical system realizes the world's highest level of measurement accuracy.In addition, the accuracy calibration is performed using the original measurement software and the reference mask, and the error factors are completely corrected to ensure the high precision and reproducibility of the measurement.